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HYBRID reactor

Réacteur HYBRIDE

  • 2 magnetron (+ 2 positions available)
  • 4 arc sources
  • DC/Pulsed DC, HPPMS, arc
  • Triple rotation substrate holder
  • Automated recipe management system

Development of HPPMS coatings for nuclear applications

Development of arc coatings for machining and nuclear applications


Learn more about the design and fabrication of Dephis machinery.