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HYBRID reactor

Réacteur HYBRIDE

  • 2 magnetron (+ 2 positions available)
  • 4 arc sources
  • DC/Pulsed DC, HPPMS, arc
  • Triple rotation substrate holder
  • Automated recipe management system

Development of HPPMS coatings for nuclear applications

Development of arc coatings for machining and nuclear applications

OUR ACHIEVEMENTS

Learn more about the design and fabrication of Dephis machinery.